Tuesday March 27
8:30 Introduction to vacuum science and system design
10:00 Session Break
12:00 Lunch
1:00 Vacuum pumps for high and ultra-high vacuum applications
2:45 Session Break
3:00 Vacuum gauging
3:45 Seals, flanges and valves
4:45 First day closing
Wednesday March 28
8:30 Physical deposition and thin film growth models
10:00 Session Break
12:00 Lunch
1:00 Introduction to atomic layer deposition
2:45 Session Break
4:00 Closing