Main laboratories in the Nick Holonyak, Jr. Micro & Nano Technology Laboratory (HMNTL)
- Growth lab
- Veeco Mod Gen II MBE system for growth of III-AsP materials (what is MBE?)
- Characterization and testing lab
- Variable-temperature photoluminescence/electroluminescence
- Solar cell testing (solar simulator, specular reflectance, external/internal quantum efficiency system, Suns-Voc)
- Electrical characterization (probe station, source meter units)
- Fischione low-angle ion mill (for TEM specimen preparation)
- Tube furnace for annealing and aging of devices
Shared facilities at University of Illinois at Urbana-Champaign
- Holonyak Micro & Nano Technology Laboratory (HMNTL) in addition to extensive cleanrooms for device fabrication, HMNTL hosts an Aixtron metalorganic vapor phase epitaxy (MOVPE) system for III-N semiconductor growth.
- Materials Research Lab (MRL)
- Center for Microanalysis of Materials– state-of-the-art facilities for characterization by high-resolution x-ray diffraction, scanning/transmission electron microscopy (S/TEM), AFM, SEM, etc.
- SEMs are equipped for cathodoluminescence (CL), electron beam-induced current (EBIC), and electron channeling contrast imaging (ECCI).
- Laser and Spectroscopy Facility– extensive instrumentation for steady-state and time-resolved luminescence, variable-angle spectroscopic ellipsometry, specular/diffuse reflectance, time-domain thermo-reflectance, FTIR, etc.
- Micro/Nanofabrication Facility– complements MNTL with additional facilities for device fabrication, including ALD, sputtering, ion milling, etc.
- Center for Microanalysis of Materials– state-of-the-art facilities for characterization by high-resolution x-ray diffraction, scanning/transmission electron microscopy (S/TEM), AFM, SEM, etc.
- Beckman Institute
- Microscopy Suite (optical microscopes, micro-Raman, micro-PL, SEM, TEM)
- Micro-Nano-Mechanical Systems Cleanroom Laboratory