Equipment and facilities

Our laboratories are located in the Nick Holonyak, Jr. Micro and Nano Technology Laboratory (HMNTL)

  • MBE growth labs (What is MBE?)
    • Veeco Mod Gen II MBE system for growth of III-AsPSb materials
      • Substrate size up to 4″
      • Group III sources: Al, Ga, and In SUMO cells
      • Group V sources: As, P, and Sb valved cracker cells
      • Doping sources: Si, Be, GaTe, and CBr4
    • Coming late 2024: Veeco Gen XCel MBE system for growth of III-N materials
      • Substrate size up to 4″
      • Veeco N plasma source
      • Group III sources: Al, Ga, and In SUMO cells
      • Doping sources: Mg, Si, Be
      • High-T effusion cell for Sc
      • E-beam source for B, Nb, Ti, Ta, etc.
  • Characterization and testing lab
    • Visible, near-infrared, and mid-infrared photoluminescence/electroluminescence
    • Laser diode test station with pulsed and CW current sources, optical spectrum analyzer, and thermoelectric stage.
    • Temperature-dependent solar cell and photodetector testing (solar simulator for LIV, specular reflectance, external/internal quantum efficiency system, Suns-Voc, TLM, dark IV, etc.)
    • Electrical characterization (probe stations and source meter units)
    • Linkam variable-T stage for device testing from LN2 temperature up to 600°C
    • Tube furnace for annealing and aging of devices
    • Thinning, grinding, and polishing station
    • Electroplating

Researchers in Lee’s group make extensive use of shared facilities at the University of Illinois Urbana-Champaign